Sparse microdefect evaluation system for large fine optical surfaces based on dark-field microscopic scattering imaging

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8838, Issue , 2013, Pages

  Yang, Yongying ^a   Wang, Shitong ^a   Chen, Xiaoyu ^a   Li, Lu ^a   Cao, Pin ^a   Yan, Lu ^a   Cheng, Zhongtao ^a   Liu, Dong ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Dark field; Microscopic scattering imaging; Quality control; Sub aperture stitching; Surface defects

Indexed keywords

DARK-FIELD; INTERNATIONAL STANDARDS; LASER SOURCES; MICRO-DEFECTS; MICROSCOPIC SCATTERING; OPTICAL SURFACES; STANDARD MEASUREMENTS; SUB-APERTURE STITCHING;

MANUFACTURE; QUALITY CONTROL; SURFACE DEFECTS;

UNCERTAINTY ANALYSIS;

EID: 84888142307     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.2023438     Document Type: Conference Paper

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