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Volumn 252, Issue 3, 2013, Pages 258-262

Controlling FIB-SBEM slice thickness by monitoring the transmitted ion beam

Author keywords

Beam position control; FIB SBEM; FIB SEM; Focused ion beam; Slice thickness

Indexed keywords

FOCUSED ION BEAMS; IONS;

EID: 84887618280     PISSN: 00222720     EISSN: 13652818     Source Type: Journal    
DOI: 10.1111/jmi.12086     Document Type: Article
Times cited : (13)

References (9)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.