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Volumn 252, Issue 3, 2013, Pages 258-262
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Controlling FIB-SBEM slice thickness by monitoring the transmitted ion beam
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Author keywords
Beam position control; FIB SBEM; FIB SEM; Focused ion beam; Slice thickness
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Indexed keywords
FOCUSED ION BEAMS;
IONS;
BEAM APPROACH;
BEAM CUTTING;
BEAM POSITION CONTROL;
BEAM POSITIONS;
FIB SEM;
FIB-SBEM;
FOCUSED IONS BEAMS;
RELATIVE POSITIONS;
SLICE THICKNESS;
TRANSMITTED BEAMS;
POSITION CONTROL;
ACCURACY;
ARTICLE;
ELECTRON MICROSCOPE;
ELECTRON MICROSCOPY;
PRIORITY JOURNAL;
RADIATION BEAM;
SERIAL BLOCK FACE ELECTRON MICROSCOPY;
TEMPERATURE;
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EID: 84887618280
PISSN: 00222720
EISSN: 13652818
Source Type: Journal
DOI: 10.1111/jmi.12086 Document Type: Article |
Times cited : (13)
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References (9)
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