Fault diagnosis expert system of semiconductor manufacturing equipment using a Bayesian network

International Journal of Computer Integrated Manufacturing

Volumn 26, Issue 12, 2013, Pages 1161-1171

  Li, Bo ^a   Han, Ting ^a   Kang, Fuyong ^a  

^a UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

Bayesian network; expert system; fault diagnosis

Indexed keywords

BAYESIAN NETWORKS; EXPERT SYSTEMS; FAILURE ANALYSIS; MODELING LANGUAGES; SEMICONDUCTOR DEVICE MANUFACTURE;

CAUSAL RELATIONSHIPS; FAULT DIAGNOSIS EXPERT SYSTEM; INFERENCE MACHINE; INFERENCE METHODS; KEY TECHNOLOGIES; KNOWLEDGE SOURCES; PRODUCTION RULES; SEMICONDUCTOR MANUFACTURING;

FAULT DETECTION;

EID: 84887461005     PISSN: 0951192X     EISSN: 13623052     Source Type: Journal    
DOI: 10.1080/0951192X.2013.812803     Document Type: Article

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