A multi-frequency vibration-based MEMS electromagnetic energy harvesting device

Sensors and Actuators, A: Physical

Volumn 204, Issue , 2013, Pages 37-43

  Liu, Huicong ^a,b   Qian, You ^b   Lee, Chengkuo ^b  

^a SOOCHOW UNIVERSITY   (China)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Electromagnetic; Energy harvesting device; Microelectromechanical systems (MEMS); Multi frequency

Indexed keywords

ELECTROMAGNETIC; ENERGY HARVESTING DEVICE; EXCITATION FREQUENCY; FEASIBILITY STUDIES; MAXIMUM POWER DENSITY; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MULTI FREQUENCY; SUSPENSION STRUCTURE;

DAMAGE DETECTION; ELECTROMAGNETIC WAVES; ELECTROMECHANICAL DEVICES; ENERGY HARVESTING; MAGNETS; MEMS;

VIBRATIONS (MECHANICAL);

EID: 84887096368     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2013.09.015     Document Type: Article

References (35)

1. 2 films Nature 353 6346 1991 737 740 (Pubitemid 21912607)
2. M. Law, L.E. Greene, J.C. Johnson, R. Saykally, and P. Yang Nanowire dye-sensitized solar cells Nat. Mater. 4 6 2005 455 459 (Pubitemid 40774050)
3. J. Xie, C. Lee, and H. Feng Design, fabrication, and characterization of CMOS MEMS-based thermoelectric power generators J. Microelectromech. Syst. 19 2 2010 317 324
4. J. Xie, C. Lee, M.F. Wang, Y. Liu, and H. Feng Characterization of heavily doped polysilicon films for CMOS-MEMS thermoelectric power generators J. Micromech. Microeng. 19 12 2009 125029
5. S. Roundy, and P.K. Wright A piezoelectric vibration based generator for wireless electronics Smart Mater. Struct. 13 5 2004 1131 1142
6. A. Khaligh, P. Zeng, and C. Zheng Kinetic energy harvesting using piezoelectric and electromagnetic technologies - state of the art IEEE Trans. Ind. Electron. 57 3 2010 850 860
7. H. Liu, S. Zhang, R. Kathiresan, T. Kobayashi, and C. Lee Development of piezoelectric microcantilever flow sensor with wind-driven energy harvesting capability Appl. Phys. Lett. 100 22 2012 223905
8. H. Liu, C. Lee, T. Kobayashi, C.J. Tay, and C. Quan Piezoelectric MEMS-based wideband energy harvesting systems using a frequency-up-conversion cantilever stopper Sens. Actuators A: Phys. 186 2012 242 248
9. D.P. Arnold Review of microscale magnetic power generation IEEE Trans. Magn. 43 11 2007 3940 3951
10. S. Roundy, and E. Takahashi A planar electromagnetic energy harvesting transducer using a multi-pole magnetic plate Sens. Actuators A: Phys. 195 2013 98 104
11. K. Ashraf, M.H. Md Khir, J.O. Dennis, and Z. Baharudin Improved energy harvesting from low frequency vibrations by resonance amplification at multiple frequencies Sens. Actuators A: Phys. 195 2013 123 132
12. Y. Suzuki Recent progress in MEMS electret generator for energy harvesting IEEJ Trans. Electr. Electr. Eng. 6 2 2011 101 111
13. S. Saadon, and O. Sidek A review of vibration-based MEMS piezoelectric energy harvesters Energy Convers. Manage. 52 1 2011 500 504
14. N. Heidrich, F. Knöbber, V. Polyakov, V. Cimalla, W. Pletschen, R.E. Sah, L. Kirste, S. Leopold, S. Hampl, O. Ambacher, and V. Lebedev Corrugated piezoelectric membranes for energy harvesting from aperiodic vibrations Sens. Actuators A: Phys. 195 2013 32 37
15. Y. Feng, K. Hagiwara, Y. Iguchi, and Y. Suzuki Trench-filled cellular parylene electret for piezoelectric transducer Appl. Phys. Lett. 100 2012 262901
16. P.D. Mitcheson, T.C. Green, E.M. Yeat, and H.S. Holmes Architectures for vibration-driven micropower generators J. Microelectromech. Syst. 13 3 2004 429 440
17. E. Reilly, L. Miller, R. Fain, and P.K. Wright A study of ambient vibrations for piezoelectric energy conversion Proc. PowerMEMS 2009 2009 312 315
18. L.M. Miller, E. Halvorsen, T. Dong, and P.K. Wright Modeling and experimental verification of low-frequency MEMS energy harvesting from ambient vibrations J. Micromech. Microeng. 21 4 2011 045029
19. I. Sari, T. Balkan, and H. Kulah An electromagnetic micro power generator for wideband environmental vibrations Sens. Actuators A 123 124 2008 63 72
20. H. Liu, C.J. Tay, C. Quan, T. Kobayashi, C. Lee, and M.E.M.S. Piezoelectric energy harvester for low-frequency vibrations with wideband operation range and steadily increased output power J. Microelectromech. Syst. 20 5 2011 1131 1142
21. H. Liu, C. Lee, T. Kobayashi, C.J. Tay, and C. Quan Investigation of a MEMS piezoelectric energy harvester system with a frequency-widened-bandwidth mechanism introduced by mechanical stoppers Smart Mater. Struct. 21 3 2012 035005
22. H. Liu, C. Lee, T. Kobayashi, C.J. Tay, and C. Quan A new S-shaped MEMS PZT cantilever for energy harvesting from low frequency vibrations below 30 Hz Microsyst. Technol. 18 4 2012 497 506
23. D.S. Nguyen, and E. Halvorsen Nonlinear springs for bandwidth-tolerant vibration energy harvesting J. Microelectromech. Syst. 20 6 2011 1225 1227
24. L. Tang, and Y. Yang A nonlinear piezoelectric energy harvester with magnetic oscillator Appl. Phys. Lett. 101 9 2012 094102
25. T. Galchev, E. Aktakka, and K. Najafi A piezoelectric parametric frequency increased generator for harvesting low-frequency vibrations J. Microelectromech. Syst. 21 2012 1311 1320
26. Y. Uzun, and E. Kurt The effect of periodic magnetic force on a piezoelectric energy harvester Sens. Actuators A: Phys. 192 2013 58 68
27. I.N. Ayala-Garcia, P.D. Mitcheson, E.M. Yeatman, D. Zhu, J. Tudor, and S.P. Beeby Magnetic tuning of a kinetic energy harvester using variable reluctance Sens. Actuators A: Phys. 189 2013 266 275
28. N.N.H. Ching, H.Y. Wong, W.J. Li, P.H.W. Leong, and Z. Wen A laser-micromachined multi-modal resonating power transducer for wireless sensing systems Sens. Actuators A: Phys. 97-98 2002 685 690 (Pubitemid 34758783)
29. B. Yang, C. Lee, W. Xiang, J. Xie, J.H. He, R.K. Kotlanka, S.P. Low, and H. Feng Electromagnetic energy harvesting from vibrations of multiple frequencies J. Micromech. Microeng. 19 3 2009 035001
30. B. Yang, J. Liu, G. Tang, J. Luo, C. Yang, and Y. Li A generator with nonlinear spring oscillator to provide vibrations of multi-frequency Appl. Phys. Lett. 99 22 2012 223505
31. H. Liu, B.W. Soon, N. Wang, C.J. Tay, C. Quan, and C. Lee Feasibility study of a 3-D vibration-driven electromagnetic MEMS energy harvester with multiple vibration modes J. Micromech. Microeng. 22 12 2012 125020
32. M.M.R. El-Hebeary, M.H. Arafa, and S.M. Megahed Modeling and experimental verification of multi-modal vibration energy harvesting from plate structures Sens. Actuators A: Phys. 193 2013 35 47
33. S.P. Beeby, R.N. Torah, M.J. Tudor, P. Glynne-Jones, T. O'Donnell, C.R. Saha, and S. Roy J. Micromech. Microeng. 17 7 2007 1257 1265
34. C. Shearwood, and R.B. Yates Development of an electromagnetic microgenerator Electron. Lett. 33 22 1997 1883 1884 (Pubitemid 127543385)
35. H.A. Haus, J.R. Melcher, Electromagnetic Fields and Energy (MIT OpenCourseWare), http://web.mit.edu/6.013-book/www/.