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Volumn , Issue , 2002, Pages 50-53
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A novel miniature azimuth-level detector based on MEMS
a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ELECTROMECHANICAL DEVICES;
ERRORS;
MAGNETIC LEVITATION VEHICLES;
MAGNETOMETERS;
MEMS;
MICROMECHANICS;
SURFACE MICROMACHINING;
VEHICLES;
ABSOLUTE MEASUREMENTS;
DUAL AXIS ACCELEROMETERS;
EARTH'S MAGNETIC FIELD;
LONG TERM PERFORMANCE;
SILICON SURFACE MICROMACHINING;
SINGLE AXIS ACCELEROMETERS;
THREE AXIS ACCELEROMETERS;
THREE DIMENSIONAL SPACE;
ACCELEROMETERS;
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EID: 84963864298
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/MEMSC.2001.992740 Document Type: Conference Paper |
Times cited : (17)
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References (4)
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