A model for phosphosilicate glass deposition via POCl3 for control of phosphorus dose in Si

Journal of Applied Physics

Volumn 112, Issue 12, 2012, Pages

  Chen, Renyu ^a   Wagner, Hannes ^b   Dastgheib Shirazi, Amir ^c   Kessler, Michael ^d   Zhu, Zihua ^e   Shutthanandan, Vaithiyalingam ^e   Altermatt, Pietro P ^b   Dunham, Scott T ^a  

^a University of Washington   (United States)

^b LEIBNIZ UNIVERSITY HANNOVER   (Germany)

^c UNIVERSITY OF KONSTANZ   (Germany)

^d INSTITUTE FOR SOLAR ENERGY RESEARCH HAMELIN ISFH   (Germany)

^e PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GLASS; PHOSPHORUS; SILICA; SILICON OXIDES;

CRYSTALLINE SILICON SOLAR CELLS; DEACTIVATION MODEL; EXPERIMENTAL CONDITIONS; LINEAR PARABOLIC MODEL; MEASURE CONCENTRATION; PHOSPHORUS CONCENTRATION; PHOSPHORUS DIFFUSION; PHOSPHOSILICATE GLASS;

CHLORINE COMPOUNDS;

EID: 84886768505     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4771672     Document Type: Article

References (13)

1. C. S. Solanski, Solar Photovoltaics: Fundamentals, Technologies and Applications (PHI Learning, New Delhi, 2009).
2. P. Negrini, D. Nobili, and S. Solmi, J. Electrochem. Soc. 122, 1254 (1975). 10.1149/1.2134437
3. J. M. Eldridge and P. Balk, Trans. Metall. Soc. AIME 242, 539 (1968).
4. See http://www.sciencelab.com/msds.php?msdsId=9927394 for Phosphorus oxychloride, MSDS, accessed 7 May 2012.
5. B. E. Deal and A. S. Grove, J. Appl. Phys. 36, 3770 (1965). 10.1063/1.1713945
6. J. D. Plummer, M. D. Deal, and P. B. Griffin, Silicon VLSI Technology: Fundamentals, Practice, and Modeling (Prentice Hall, NJ, 2000).
7. S. T. Dunham, J. Electrochem. Soc. 139, 2628 (1992). 10.1149/1.2221276
8. H. Bracht, H. H. Silvestri, I. D. Sharp, and E. E. Haller, Phys. Rev. B 75, 035211 (2007). 10.1103/PhysRevB.75.035211
9. H. Wagner, A. Dastgheib-Shirazi, R. Chen, S. T. Dunham, and P. P. Altermatt, in 2011 IEEE PVSC (Seattle, 2011).
10. R. N. Ghoshtagore, Solid-State Electron. 17, 1065 (1974). 10.1016/0038-1101(74)90146-4
11. A. Bentzen, A. Holt, J. S. Christensen, and B. G. Svensson, J. Appl. Phys. 99, 064502 (2006). 10.1063/1.2179197
12. J. Schön and W. Warta, in Proceedings of the 24th European Photovoltaic Solar Energy Conference (WIP, Valencia, Spain, 2008), pp. 1851-1854.
13. H. Talvitie, V. Vahanissi, A. Haarahiltunen, M. Yli-Koski, and H. Savin, J. Appl. Phys. 109, 093505 (2011). 10.1063/1.3582086