SiC-FET methanol sensors for process control and leakage detection

Sensors and Actuators, B: Chemical

Volumn 187, Issue , 2013, Pages 553-562

  Darmastuti, Z ^a   Bhattacharyya, P ^b   Andersson, M ^a   Kanungo, J ^c   Basu, S ^c   Kall P O ^a   Ojamae L ^a   Lloyd Spetz, A ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

^b INDIAN INSTITUTE OF ENGINEERING SCIENCE AND TECHNOLOGY   (India)

^c JADAVPUR UNIVERSITY   (India)

Author keywords

Gas sensor; Ir; Methanol; Pt; Quantum chemical calculation; SiC FET sensor

Indexed keywords

CHEMICAL DETECTION; CHEMICAL SENSORS; DENSITY FUNCTIONAL THEORY; FIELD EFFECT TRANSISTORS; IRIDIUM; LEAK DETECTION; METHANOL; OXYGEN; PLATINUM; POWER FIELD EFFECT TRANSISTORS; PROPYLENE; QUANTUM CHEMISTRY; SILICON CARBIDE; WATER VAPOR;

CONCENTRATION RANGES; CROSS SENSITIVITY; DETECTION MECHANISM; FET SENSORS; FIELD EFFECT TRANSISTOR SENSORS; HYBRID DENSITY FUNCTIONAL THEORY; LEAKAGE DETECTION; QUANTUM CHEMICAL CALCULATIONS;

PROCESS CONTROL;

EID: 84885478886     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2013.04.019     Document Type: Article

References (26)

1. GA Olah, After oil gas: methanol economy, Catalysis Letters 93 (2004) 1-2.
2. 2 hydrogenation on Cu(1 11), Cu clusters, and Cu/ZnO(0 01), Physical Chemistry Chemical Physics 12 (2010) 9909-9917.
3. X. Liu, G.Q. Lu, Z. Yan, J. Beltramini, Recent advances in catalysts for methanol synthesis via hydrogenation of CO and CO, Industrial and Engineering Chemistry Research 42 (25) (2003) 6518-6530. (Pubitemid 37517546)
4. 3OH methanol sensor, Detcon Inc., www.detcon.com
5. 2-ZnO nanofibers, Advanced Materials Research (2012) 356-360.
6. TGS 822 Figaro alcohol sensor, Figaro USA Inc., www.figarosensor.com
7. M. Andersson, P. Ljung, M. Mattsson, M. Lofdahl, A. Lloyd Spetz, Investigations on the possibilities of a MISiCFET sensor system for OBD and combustion control utilizing different catalytic gate materials, Topics in Catalysis 30-31 (2004) 365-368.
8. I. Lundström, H. Sundgren, F. Winquist, M. Eriksson, C. Krantz-Rülcker, A. Lloyd Spetz, Twenty-five years of field effect gas sensor research in Linköping, Sensors and Actuators B 121 (2007) 247-262. (Pubitemid 46123902)
9. J. Kanungo, M. Anderson, Z. Darmastuti, S. Basu, P.O. Kall, L. Ojamae, A.L. Spetz, Development of SiC-FET methanol sensor, Sensors and Actuators B (2011) 72-78.
10. M.J. Frisch, G.W. Trucks, H.B. Schlegel, G.E. Scuseria, MA Robb, J.R. Cheeseman, J. Montgomery, J AT. Vreven, K.N. Kudin, J.C. Burant, J.M. Millam, S.S. Iyengar, J. Tomasi, V. Barone, B. Mennucci, M. Cossi, G. Scalmani, N. Rega, GA Petersson, H. Nakatsuji, M. Hada, M. Ehara, K. Toyota, R. Fukuda, J. Hasegawa, M. Ishida, T. Nakajima, Y. Honda, O. Kitao, H. Nakai, M. Klene, X. Li, J.E. Knox, H.P. Hratchian, J.B. Cross, V. Bakken, C. Adamo, J. Jaramillo, R. Gomperts, R.E. Stratmann, O. Yazyev, A.J. Austin, R. Cammi, C. Pomelli, J.W. Ochterski, P.Y. Ayala, K. Morokuma, G.A. Voth, P. Salvador, J.J. Dannenberg, V.G. Zakrzewski, S. Dapprich, A.D. Daniels, M.C. Strain, O. Farkas, D.K. Malick, A.D. Rabuck, K. Raghavachari, J.B. Foresman, J.V. Ortiz, Q. Cui, A.G. Baboul, S. Clifford, J. Cioslowski, B.B. Stefanov, G. Liu, A. Liashenko, P. Piskorz, I. Komaromi, R.L. Martin, D.J. Fox, T. Keith, MA Al-Laham, C.Y. Peng, A. Nanayakkara, M. Challacombe, P.M.W. Gill, B. Johnson, W. Chen, M.W. Wong, C. Gonzalez, J.A. Pople, Gaussian 03, Revision C.02, Gaussian, Inc., Wallingford, CT, 2004.
11. A.D. Becke, Density-functional exchange-energy approximation with correct asymptotic-behavior, Physical Review A 38 (1988)3098-3100.
12. C. Lee, W. Yang, R.G. Parr, Development of the Colle-Salvetticor relation-energy formula into a functional of the electron density, Physical Review B 37 (1988) 785-789.
13. P.J. Hay, W.R. Wadt, Ab initio effective core potentials for molecular calculations - potentials for the transition-metal atoms Sc to Hg, Journal of Chemical Physics 82 (1985) 270-283.
14. 2 on Ir(100) surface, Chemical Physics 385 (2011) 35-40.
15. H. Amandusson, L.-G. Ekedahl, H. Dannetun, Methanol-induced hydrogen permeation through a palladium membrane, Surface Science 442 (1999) 199-205. (Pubitemid 30514263)
16. 2 supported Pd, Surface Science (1994) 139-152.
17. BA Sexton, Methanol decomposition on platinum (111), Surface Science (1981)271-281.
18. M. Andersson, H. Wingbrant, A. Lloyd Spetz, Study of the CO response of SiC based field effect gas sensors, in: Proceedings of IEEE Sensors 2005, Irvine, USA, October 31-November 2, 2005, pp. 105-108.
19. 3 in SCR systems, IEEE Sensors Journal 5 (5) (2005) 1099-1105. (Pubitemid 41594478)
20. CF. Lo, C.Y. Chang, B.H. Chu, S.J. Pearton, A. Dabiran, P.P. Chow, F. Ren, Effect of humidity on hydrogen sensitivity of Pt-gated AlGaN/GaN high electron mobility transistor based sensors, Applied Physics Letters 96 (2010) 232106.
21. U. Lampe, E. Simon, R. Pohle, M. Fleischer, H. Meixner, H. Frerichs, M. Lehmann, G. Kiss, GasFET for the detection of reducing gases, Sensors and Actuators B: Chemical 111-112 (Suppl.) (2005) 106-110.
22. S. Nakagomi, P. Tobias, A. Baranzahi, I. Lundström, P. Mårtensson, A. Lloyd Spetz, Influence of carbon monoxide, water, and oxygen on high temperature catlaytic metal-oxide-silicon carbide structures, Sensors and Actuators B 45/3 (1997) 183-191. (Pubitemid 127434768)
23. R. Pearce, A. Hagelin, P.-O Käll, R. Yakimona, A.L. Spetz, E. Becker, M. Skoglundh, Effect of water vapour on Ga doped ZnO nanoparticle sensor gas response, in: Proceedings of IEEE Sensors 2009, Christchurch, New Zealand, Oct. 26-28, 2009, pp. 2039-2044.
24. K. Scharnagl, A. Karthigeyan, M. Burgmair, M. Zimmer, T. Doll, I. Eisele, Low temperature hydrogen detection at high concentrations: comparison of platinum and iridium, Sensors and Actuators B 80 (2001) 163-168. (Pubitemid 33018868)
25. T. Yamaguchi, T. Kiwa, K. Tsukada, K. Yokosawa, Oxygen interference mechanism of platinum-FET hydrogen gas sensor, Sensors and Actuators A: Physical (2007)244-248. (Pubitemid 46590686)
26. C. Bur, P. Reimann, M. Andersson, et al, Increasing the selectivity of Pt-Gate SiC field effect gas sensors by dynamic temperature modulation, IEEE Sensors Journal 12 (6) (2012).