Effect of metal oxide sensing layers on the distinct detection of ammonia using surface acoustic wave (SAW) sensors

Sensors and Actuators, B: Chemical

Volumn 187, Issue , 2013, Pages 563-573

  Bhasker Raj, V ^a   Singh, Harpreet ^b   Nimal, A T ^b   Tomar, Monika ^c   Sharma, M U ^b   Gupta, Vinay ^a  

^a UNIVERSITY OF DELHI   (India)

^b SOLID STATE PHYSICS LABORATORY   (India)

^c UNIVERSITY OF DELHI   (India)

Author keywords

Ammonia; Mass loading; Mechanism; Metal oxide; SAW

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; AMMONIA; AMORPHOUS FILMS; AMORPHOUS MATERIALS; CHEMICAL SENSORS; MECHANISMS; METALLIC COMPOUNDS; METALLIC FILMS; METALS; SAWING; THIN FILMS; TITANIUM DIOXIDE; ZINC OXIDE;

C AXIS ORIENTED; MASS LOADINGS; METAL OXIDES; OPTIMIZED PARAMETER; SELECTIVE DETECTION; SENSING RESPONSE; SENSITIVE LAYERS; SURFACE ACOUSTIC WAVE SENSORS;

LOADING;

EID: 84885476611     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2013.04.063     Document Type: Article

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