A standard to test the dynamics of vacuum gauges in the millisecond range

Vacuum

Volumn 100, Issue , 2014, Pages 14-17

  Jousten, Karl ^a   Pantazis, Sarantis ^a   Buthig, Joachim ^a   Model, Regine ^a   Wüest, Martin ^b   Iwicki, Jaroslaw ^c  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b INFICON AG   (Liechtenstein)

^c VACOM GmbH   (Germany)

Author keywords

Choked flow; Dynamic pressure; Response time; Vacuum gauge; Vacuum metrology

Indexed keywords

COMPUTER SOFTWARE; DIAPHRAGMS; FLOW OF GASES; RESPONSE TIME (COMPUTER SYSTEMS); VACUUM GAGES;

CAPACITANCE DIAPHRAGM GAUGES; CHOKED FLOW; DYNAMIC PRESSURES; MILLISECOND RANGE; PRESSURE CHANGE; SIMPLE PHYSICAL MODELS; VACUUM GAUGES; VACUUM METROLOGY;

GAGES;

EID: 84885434839     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2013.07.037     Document Type: Article

References (7)

1. http://www.emrponline.eu/ and http://www.ptb.de/emrp/vacuum.html.
2. Sonderegger K, Dür M, Buthig J, Pantazis S, Jousten K. J Vac Sci Technol A 2013;31:060601. http://dx.doi.org/10.1116/1.4813836.
3. Varoutis S, Valougeorgis D, Sharipov F. J Vac Sci Technol A 2009;27(6):1377-91.
4. Jousten K, editor. Handbook of vacuum technology. Weinheim: Wiley-VCH; 2008. p. 93-7.
5. Jousten K. Vacuum 1994;45:1205-8.
6. Pantazis S, Buthig J, Jousten K. 2013, to be published.
7. Pantazis S. AIP Conference Proceedings 2012;1501:451-6. http://dx.doi.org/10.1063/1.4769567.