Very fast-opening UHV gate valve

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 31, Issue 6, 2013, Pages

  Sonderegger, Kurt ^a   Dür, Michael ^a   Buthig, Joachim ^b   Pantazis, Sarantis ^b   Jousten, Karl ^b  

^a VAT ^*  (Switzerland)

^b PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABSOLUTE PRESSURE; DIFFERENTIAL PRESSURES; DYNAMIC VACUUM; FAST PROCESS; GATE VALVE; IN-VACUUM; OPENING TIME; PRIMARY STANDARDS;

CONDENSED MATTER PHYSICS; VACUUM APPLICATIONS;

VACUUM;

EID: 84887975166     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.4813836     Document Type: Article

References (2)

1. See http://www.emrponline.eu/ and http://www.ptb.de/emrp/vacuum.html.
2. J. W. Hammer, H. M. Schüpferling, E. Bergandt, and Th. Pflaum, Nucl. Instrum Methods 128, 409 (1975). 10.1016/0029-554X(75)90506-6