SURFACE MICROMACHINE MICROFLUIDICS: DESIGN, FABRICATION, PACKAGING, AND CHARACTERIZATION

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 1999-W, Issue , 1999, Pages 441-448

  Galambos, Paul ^a   Eaton, William P ^a   Shul, Randy ^a   Willison, Christi Gober ^a   Sniegowski, Jeffry J ^a   Miller, Samuel L ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; FABRICATION; FLOW RATE; FLUIDIC DEVICES; MEMS; SILICON NITRIDE; SURFACE MICROMACHINING;

DEVICE DEVELOPMENT; DEVICES AND SYSTEMS; MICROFLUIDICS DEVICES; MICROFLUIDICS SYSTEMS; NEW DEVICES; PACKAGING PROBLEMS; RAPID GROWTH; SMALL CHANNELS; SURFACE MICRO-MACHINING; SYSTEM DEVELOPMENT;

MICROFLUIDICS;

EID: 84885292918     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE1999-0303     Document Type: Conference Paper

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