MEMS MICRO-VALVE ARRAYS FOR FLUIDIC CONTROL

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 1998-AE, Issue , 1998, Pages 145-151

  Wroblewski, Donald E ^a   Horenstein, Mark ^a   Vandelli, Nelsimar ^a   Velonis, Margo ^a   Bifano, Thomas ^a  

^a Boston University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIRCRAFT ENGINES; ELECTROSTATIC ACTUATORS; LINEAR CONTROL SYSTEMS; MICROCHANNELS; VALVES (MECHANICAL); VOLUME FRACTION;

BISTABLES; FLUIDIC CONTROL; MECHANICAL; MICRO VALVES; MICRO-FLUIDICS; MICROFLUIDICS SYSTEMS; PARALLEL ARRAYS; PRECISION FLOW CONTROL; SILICON MEMS; VALVE ARRAYS;

FLOW RATE;

EID: 85122692900     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE1998-1235     Document Type: Conference Paper

References (9)

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