Demonstratign and characterization of a multi-stage silicon microturbine

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn 7 MEMS, Issue , 2005, Pages 699-705

  Lee, Changgu ^a   Fréchette, Luc G ^a,b  

^a Fu Foundation School of Engineering and Applied Science   (United States)

^b UNIVERSITÉ DE SHERBROOKE   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

MECHANICAL POWER; MICROTURBINES; SILICON MICROTURBINE; TURBINE ISENTROPIC EFFICIENCY;

COMPUTATIONAL FLUID DYNAMICS; CORRELATION THEORY; PRESSURE EFFECTS; SILICON WAFERS; TURBINES;

MICROELECTROMECHANICAL DEVICES;

EID: 33645957935     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2005-81435     Document Type: Conference Paper

References (12)

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