Fabrication of freestanding 1-D PDMS microstructures using capillary micromolding

Journal of Microelectromechanical Systems

Volumn 22, Issue 5, 2013, Pages 992-994

  Rajagopalan, Jagannathan ^a   Saif, M Taher A ^b  

^a Arizona State University   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

BioMEMS; Cell mechanics; Force sensors

Indexed keywords

CAPILLARY MICROMOLDING; CELL MECHANICS; FORCE SENSOR; MECHANO-BIOLOGY; PDMS MICROSTRUCTURES; POLYDIMETHYLSILOXANE PDMS; SI SUBSTRATES; SILICON SUBSTRATES;

BIOCOMPATIBILITY; BIOMEMS; CYTOLOGY; MICROCHANNELS; MICROSTRUCTURE; SENSORS; SILICON; SUBSTRATES;

SILICONES;

EID: 84885190770     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2013.2262605     Document Type: Article

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