Synthesis and growth mechanism of Thin-film TiO2 nanotube arrays on focused-ion-beam micropatterned 3D isolated regions of titanium on silicon

ACS Applied Materials and Interfaces

Volumn 5, Issue 18, 2013, Pages 9026-9033

  Amani Hamedani, Hoda ^a   Lee, Simon W ^a   Al Sammarraie, Abdulkareem ^b   Hesabi, Zohreh R ^a   Bhatti, Asim ^c   Alamgir, Faisal M ^a   Garmestani, Hamid ^a   Khaleel, Mohammad A ^d  

^a Georgia Institute of Technology   (United States)

^b UNIVERSITY OF BAGHDAD   (Iraq)

^c DEAKIN UNIVERSITY   (Australia)

^d PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

Author keywords

electrochemical anodization; focused ion beam; micropatterning; thin film TiO2 nanotubes; XPS; XRD

Indexed keywords

ELECTRO-CHEMICAL ANODIZATION; FOCUSED ION BEAM TECHNIQUE; GROWTH MECHANISMS; HIGH ASPECT RATIO; MICRO PATTERNING; SILICON SUBSTRATES; TIO; XRD;

ASPECT RATIO; FOCUSED ION BEAMS; ION BEAMS; NANOTUBES; SILICON; THREE DIMENSIONAL; TITANIUM; TITANIUM DIOXIDE; X RAY PHOTOELECTRON SPECTROSCOPY;

FILM GROWTH;

EID: 84885025436     PISSN: 19448244     EISSN: 19448252     Source Type: Journal    
DOI: 10.1021/am402203m     Document Type: Article

References (25)

1. Kuypers, J. H.; Zolfagharkhani, G.; Gaidarzhy, A.; Thalmayr, F.; Sparks, A.; Chen, D. M.; Rebel, R.; Newman, B.; Asmani, M.; Badillo, D.; Schoepf, K. J. Proc. IEEE Int. Freq. Control Symp. 2012, 1-5
2. Robinson, J. T.; Jorgolli, M.; Shalek, A. K.; Yoon, M.-H.; Gertner, R. S.; Park, H. Nat. Nanotechnol. 2012, 7, 180-184
3. Kuan-Lun, C.; Gold, S.; Subramanian, V.; Chang, L.; Shannon, M. A.; Masel, R. I. J. Microelectromech. Syst. 2006, 15, 671-677
4. Lu, H. F.; Li, F.; Liu, G.; Chen, Z.-G.; Wang, D.-W.; Fang, H.-T.; Lu, G. Q.; Jiang, Z. H.; Cheng, H.-M. Nanotechnology 2008, 19, 405504-405511
5. Shankar, K.; Basham, J. I.; Allam, N. K.; Varghese, O. K.; Mor, G. K.; Feng, X.; Paulose, M.; Seabold, J. A.; Choi, K.-S.; Grimes, C. A. J. Phys. Chem. C 2009, 113, 6327-6359
6. Su, X.; Wu, Q.; Zhan, X.; Wu, J.; Wei, S.; Guo, Z. J. Mater. Sci. 2012, 47, 2519-2534
7. Rettew, R. E.; Allam, N. K.; Alamgir, F. M. ACS Appl. Mater. Interfaces 2011, 3, 147-151
8. Ortiz, G. F.; Hanzu, I.; Knauth, P.; Lavela, P.; Tirado, J. L.; Djenizian, T. Electrochim. Acta 2009, 54, 4262-4268
9. Varghese, O. K.; Paulose, M.; Grimes, C. A. Nat. Nanotechnol. 2009, 4, 592-597
10. Macak, J. M.; Tsuchiya, H.; Berger, S.; Bauer, S.; Fujimoto, S.; Schmuki, P. Chem. Phys. Lett. 2006, 428, 421-425
11. Mor, G. K.; Varghese, O. K.; Paulose, M.; Shankar, K.; Grimes, C. A. Sol. Energy Mater. Sol. Cells 2006, 90, 2011-2075
12. Roy, P.; Berger, S.; Schmuki, P. Angew. Chem., Int. Ed. 2011, 50, 2904-2939
13. Hamedani, H. A.; Allam, N. K.; Garmestani, H.; El-Sayed, M. A. J. Phys. Chem. C 2011, 115, 13480-13486
14. Allam, N. K.; Alamgir, F.; El-Sayed, M. A. ACS Nano 2010, 4, 5819-5826
15. Chappanda, K. N.; Smith, Y. R.; Misra, M.; Mohanty, S. K. Nanotechnology 2012, 23, 38601-38609
16. Masuda, Y.; Ieda, S.; Koumoto, K. Langmuir 2003, 19, 4415-4419
17. Lai, Y.; Huang, J.; Gong, J.; Huang, Y.; Wang, C.; Chen, Z.; Lin, C. J. Electrochem. Soc. 2009, 156, D480-D484
18. Pittrof, A.; Bauer, S.; Schmuki, P. Acta Biomater. 2011, 7, 424-431
19. Chen, B.; Lu, K. Phys. Chem. Chem. Phys. 2012, 15, 1854-1862
20. Chen, B.; Lu, K.; Tian, Z. J. Mater. Chem. 2011, 21, 8835-8840
21. Berger, S.; Hahn, R.; Roy, P.; Schmuki, P. Phys. Status Solidi B 2010, 247, 2424-2435
22. Mohammadpour, A.; Waghmare, P. R.; Mitra, S. K.; Shankar, K. ACS Nano 2010, 4, 7421-7430
23. Ghicov, A.; Schmuki, P. Chem. Commun. 2009, 0, 2791-2808
24. Yasuda, K.; Ghicov, A.; Nohiraa, T.; Kani, N.; Hagiwara, R.; Schmuki, P. Electrochem. Solid-State Lett. 2008, 11, C51-C54
25. Macak, J. M.; Tsuchiya, H.; Ghicov, A.; Yasuda, K.; Hahn, R.; Bauer, S.; Schmuki, P. Curr. Opin. Solid State Mater. Sci. 2007, 11, 3-18