AC simulation of a thermal flow sensor in a microfluidic Channel

Procedia Engineering

Volumn 47, Issue , 2012, Pages 1394-1397

  Reyes Romero, Diego F ^a   Cubukcu, Ali S ^a   Urban, Gerald A ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Fem simulation; Flow sensor; High frequency; Thermal flow sensor

Indexed keywords

EID: 84884863757     PISSN: 18777058     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proeng.2012.09.417     Document Type: Conference Paper

References (5)

1. Beigelbeck R, et al. Thermal property determination of laminar-flowing fluids utilizing the frequency response of a calorimetric flow sensor. in Sensors, 2008, IEEE. 2008. Lecce, Italy.
2. Cubukcu AS, et al., A 2D thermal flow sensor with sub-mW power consumption. Sens. Actuators, A, 2010. 163(2): p. 449-456.
3. Ernst H, Jachimowicz A, and Urban GA, High resolution flow characterization in Bio-MEMS. Sens. Actuators, A, 2002. 100(1): p. 54-62.
4. Urban G, et al., High-resolution thin-film temperature sensor arrays for medical applications. Sens. Actuators, A, 1989. 22(1-3): p. 650-654.
5. Lide DR, ed. CRC Handbook of Chemistry and Physics. 90th ed. 2009, CRC Press/Taylor and Francis: Boca Raton. 2804.