An integrated method for material properties characterization based on pulsed laser generated surface acoustic waves

Microelectronic Engineering

Volumn 112, Issue , 2013, Pages 249-254

  Orphanos, Yannis ^a,b,c   Dimitriou, Vasilis ^a,b   Kaselouris, Evaggelos ^a,b   Bakarezos, Efthimios ^a,b   Vainos, Nikolaos ^c,d   Tatarakis, Michael ^a,b   Papadogiannis, Nektarios A ^a,b  

^a Centre for Plasma Physics and Lasers   (Greece)

^b TECHNOLOGICAL EDUCATIONAL INSTITUTE OF CRETE   (Greece)

^c UNIVERSITY OF PATRAS   (Greece)

^d INSTITUTE OF BIOLOGY   (Greece)

Author keywords

Dynamic laser interferometry; Elements; Finite; Nano acoustics; Nanostructures

Indexed keywords

EXPERIMENTAL DIAGNOSTICS; FINITE; LASER GENERATED SURFACE ACOUSTIC WAVES; LASER-MATERIAL INTERACTIONS; MICROMECHANICAL CHARACTERIZATION; NANO-ACOUSTICS; SINGLE LONGITUDINAL MODE; SPATIOTEMPORAL EVOLUTION;

ACOUSTIC WAVES; CHEMICAL ELEMENTS; INTEGRATED CONTROL; LASER INTERFEROMETRY; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 84884821478     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2013.03.146     Document Type: Article

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