Overcoming Si3N4 film stress limitations for high quality factor ring resonators

Optics Express

Volumn 21, Issue 19, 2013, Pages 22829-22833

  Luke, Kevin ^a   Dutt, Avik ^a   Poitras, Carl B ^a   Lipson, Michal ^a  

^a Cornell University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HIGH CONFINEMENT; HIGH QUALITY FACTORS; INTRINSIC QUALITY FACTORS; OPTICAL CONFINEMENT; PROPAGATION LOSS; QUALITY FACTORS; RING RESONATOR; WAVELENGTH RANGES;

OPTICAL RESONATORS; PHOTONIC DEVICES; SILICON NITRIDE; STRESSES;

SILICON;

EID: 84884540780     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.21.022829     Document Type: Article

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