High-sensitivity roll-angle interferometer

Optics Letters

Volumn 38, Issue 18, 2013, Pages 3600-3603

  Le, Yanfen ^a   Hou, Wenmei ^a   Hu, Kai ^a   Shi, Kai ^a  

^a UNIVERSITY OF SHANGHAI FOR SCIENCE AND TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CENTROSYMMETRIC; HIGH SENSITIVITY; INTERFEROMETER SYSTEMS; MEASUREMENT RESOLUTION; MEASUREMENT STRUCTURES; MIRROR ASSEMBLY; OPTICAL PATH; PITCH ERRORS;

INTERFEROMETRY;

INTERFEROMETERS;

EID: 84884240821     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.38.003600     Document Type: Article

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