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Volumn 8704, Issue , 2013, Pages

High performance LWIR microbolometer with Si/SiGe Quantum well thermistor and wafer level packaging

Author keywords

focal plane array; infrared; MEMS; microbolometer; SiGe; uncooled; wafer bonding; wafer level packaging

Indexed keywords

ELECTRO-OPTICAL MEASUREMENTS; LONG WAVE INFRARED REGIONS; MICROBOLOMETER; PERFORMANCE CHARACTERISTICS; READOUT INTEGRATED CIRCUITS; SIGE; UNCOOLED; WAFER LEVEL PACKAGING;

EID: 84883747508     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.2014914     Document Type: Conference Paper
Times cited : (6)

References (7)
  • 4
    • 79251648871 scopus 로고    scopus 로고
    • DRS uncooled vox infrared detector development and production status
    • C. Li, C.J. Han, G. D. Skidmore, C. Hess, "DRS Uncooled VOx Infrared Detector Development and Production Status", Proc. SPIE, Vol 7660, 76600V-1 (2010).
    • (2010) Proc. SPIE , vol.7660
    • Li, C.1    Han, C.J.2    Skidmore, G.D.3    Hess, C.4
  • 5
    • 10044220961 scopus 로고    scopus 로고
    • Can the 300K radiating background noise limit be attained by uncooled thermal imagers?
    • Kruse, P. W., "Can the 300K radiating background noise limit be attained by uncooled thermal imagers?", Proc. SPIE, Vol. 5406, 437-446, (2004).
    • (2004) Proc. SPIE , vol.5406 , pp. 437-446
    • Kruse P, W.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.