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Volumn 8704, Issue , 2013, Pages
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High performance LWIR microbolometer with Si/SiGe Quantum well thermistor and wafer level packaging
a
Sensonor AS
(Norway)
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Author keywords
focal plane array; infrared; MEMS; microbolometer; SiGe; uncooled; wafer bonding; wafer level packaging
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Indexed keywords
ELECTRO-OPTICAL MEASUREMENTS;
LONG WAVE INFRARED REGIONS;
MICROBOLOMETER;
PERFORMANCE CHARACTERISTICS;
READOUT INTEGRATED CIRCUITS;
SIGE;
UNCOOLED;
WAFER LEVEL PACKAGING;
BOLOMETERS;
ELECTROMAGNETIC WAVES;
FOCAL PLANE ARRAYS;
INFRARED RADIATION;
MEMS;
MOEMS;
OPTICAL DATA PROCESSING;
PIXELS;
SEMICONDUCTOR QUANTUM WELLS;
SILICON WAFERS;
TEMPERATURE SENSORS;
THERMISTORS;
WAFER BONDING;
ELECTRONICS PACKAGING;
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EID: 84883747508
PISSN: 0277786X
EISSN: 1996756X
Source Type: Conference Proceeding
DOI: 10.1117/12.2014914 Document Type: Conference Paper |
Times cited : (6)
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References (7)
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