Evaluation of TiO2 films fabricated by aerosol deposition

Key Engineering Materials

Volumn 566, Issue , 2013, Pages 195-198

  Yuuki, Kazuo ^a   Uemichi, Yuta ^a   Sato, Yuuki ^a   Yoshikado, Shinzo ^a  

^a DOSHISHA UNIVERSITY   (Japan)

Author keywords

Aerosol deposition; Anatase; Brookite; Room temperature impact consolidation; Rutile; Thin film; Titanium dioxide

Indexed keywords

AEROSOLS; ATMOSPHERIC TEMPERATURE; CERAMIC MATERIALS; CRYSTAL STRUCTURE; DEPOSITION; FILM THICKNESS; FLOW OF GASES; HIGH-K DIELECTRIC; OXIDE MINERALS; RESPIRATORY MECHANICS; THIN FILMS;

AEROSOL DEPOSITION; BROOKITE; CARRIER GAS FLOW RATES; DIRECT CURRENT; LOW RESISTIVITY; RUTILE; TEMPERATURE IMPACT; TITANIUM DIOXIDES (TIO2);

TITANIUM DIOXIDE;

EID: 84883519024     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/KEM.566.195     Document Type: Conference Paper

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