A large current scanning electron microscope with MEMS-based multi-beam optics

Microelectronic Engineering

Volumn 113, Issue , 2014, Pages 109-113

  Ichimura, Takashi ^a   Ren, Yan ^a   Kruit, P ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

MEMS electron optics; Multi electron beam; Scanning electron microscope

Indexed keywords

BEAM CURRENTS; FOCUSED BEAMS; LARGE CURRENT; MICRO LENS; MULTI-ELECTRON; OBJECTIVE LENS; TOTAL CURRENT;

OPTICAL SYSTEMS; SCANNING ELECTRON MICROSCOPY;

OPTICS;

EID: 84883343613     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2013.07.008     Document Type: Article

References (5)

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2. A. Mohammadi-Gheidari, C.W. Hagen, and P. Kruit JVST B 28 6 2010 C6G5-C6G10
3. A. Mohammadi-Gheidari, and P. Kruit Nucl. Instr. Meth. A645 2011 60 67
4. Y. Zhang, and P. Kruit JVST B 25 6 2007 2239 2244
5. M.J. van Bruggen, Multi-electron beam system for high resolution electron beam induced deposition, PhD thesis, Delft University, 18th February, 2008.