Fabrication of metallic microchannel mold using X-ray LIGA for microfluidic applications

2013 10th International Conference on Electrical Engineering/Electronics, Computer, Telecommunications and Information Technology, ECTI-CON 2013

Volumn , Issue , 2013, Pages

  Phatthanakun, R ^a   Yunphuttha, C ^b   Pantong, C ^c   Sriphung, C ^a   Chomnawang, N ^c   Viravathana, P ^b  

^a SYNCHROTRON LIGHT RESEARCH INSTITUTE PUBLIC ORGANIZATION   (Thailand)

^b KASETSART UNIVERSITY   (Thailand)

^c SURANAREE UNIVERSITY OF TECHNOLOGY   (Thailand)

Author keywords

Microchannel; Microfluidic; Micromold; PDMS replication; Synchrotron light; X ray LIGA

Indexed keywords

METALLIC MICROCHANNEL MOLDS; MICRO FLUIDIC APPLICATIONS; MICRO MOLDS; PDMS REPLICATION; STAINLESS STEEL SUBSTRATES; SYNCHROTRON LIGHT; SYNCHROTRON LIGHT SOURCE; X-RAY LIGA;

ASPECT RATIO; INFORMATION TECHNOLOGY; MICROFLUIDICS; MOLDS; NICKEL PLATING; PHOTORESISTS; SUBSTRATES; SYNCHROTRON RADIATION; X RAY LITHOGRAPHY; X RAYS;

MICROCHANNELS;

FLUIDICS; LIGHT SOURCES; LITHOGRAPHY; MOLDS; RADIATION; SUBSTRATES;

EID: 84883062225     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ECTICon.2013.6559467     Document Type: Conference Paper

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