Kriging prediction from a circular grid: Application to wafer diffusion

Applied Stochastic Models in Business and Industry

Volumn 29, Issue 4, 2013, Pages 350-361

  Pistone, Giovanni ^a   Vicario, Grazia ^b  

^a Collegio Carlo Alberto ^*  (Italy)

^b POLITECNICO DI TORINO   (Italy)

Author keywords

algebraic statistics; anisotropic covariance; circular grid; Kriging model; wafer diffusion

Indexed keywords

ALGEBRAIC STATISTICS; ANISOTROPIC COVARIANCE; CIRCULAR GRIDS; CONCENTRIC CIRCLES; COVARIANCE STRUCTURES; CRYSTALLINE SLICES; KRIGING INTERPOLATION; KRIGING MODEL;

ALGEBRA; INDUSTRIAL APPLICATIONS; INTERPOLATION; MICROELECTRONICS; PROCESS CONTROL; SILICON; SILICON OXIDES; STATISTICS;

SILICON WAFERS;

EID: 84882449500     PISSN: 15241904     EISSN: 15264025     Source Type: Journal    
DOI: 10.1002/asmb.1991     Document Type: Article

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