Effect of substrate temperature on the properties of textured Ag/AZO back electrodes prepared by magnetron sputtering

Guangzi Xuebao/Acta Photonica Sinica

Volumn 42, Issue 7, 2013, Pages 812-816

  Wang, Chun Lei ^a   Wang, Chao ^a   Mao, Yan Li ^a  

^a HENAN UNIVERSITY   (China)

Author keywords

Ag AZO conductive films; Haze factor; Magnetron sputtering; The photovoltaic properties

Indexed keywords

DIFFERENT SUBSTRATES; HAZE FACTORS; OPTICAL AND ELECTRICAL PROPERTIES; PHOTO-ELECTRIC CONVERSION EFFICIENCY; PHOTOVOLTAIC PROPERTY; SPUTTERING PARAMETERS; SUBSTRATE TEMPERATURE; THIN-FILM SILICON SOLAR CELLS;

ELECTRIC PROPERTIES; FILM PREPARATION; MAGNETRON SPUTTERING; OPTIMIZATION; SILICON SOLAR CELLS;

SUBSTRATES;

EID: 84881604091     PISSN: 10044213     EISSN: None     Source Type: Journal    
DOI: 10.3788/gzxb20134207.0812     Document Type: Article

References (14)

1. CHO J S, BAEK S H, LEE J C. Surface texturing of sputtered ZnO:Al/Ag back reflectors for flexible silicon thin-film solar cells[J]. Solar Energy Materials and Solar Cells, 2011, 95(7): 1852-1858.
2. YOSHIDA T, KOMATSU D, SHIMOKAWA N, et al. Mechanism of cathodic electrodeposition of zinc oxide thin films from aqueous zinc nitrate baths[C]. Proceedings of Symposium D on Thin Filmand Nano-Structured Materials for Photovoltaics, of the E-MRS 2003 Spring Conference, 2004, 451-452: 166-169.
3. RATH J K, BRINZA M, LIU Y, BORREMAN A, et al. Fabrication of thin film silicon solar cells on plastic substrate by very high frequency PECVD[J]. Solar Energy Materials and Solar Cells, 2010, 94(9): 1534-1541.
4. YANG Chun-xiu, YAN Jin-liang, SUN Xue-qing, et al. Influence of heat treatment on chzracteristics of ZnO:Al thin films[J]. Acta Photonica Sinica, 2008, 37(12): 2478-2481.
5. SPRINGER J, RECH B, REETZ W, et al. Light trapping and optical losses in microcrystalline silicon pin solar cells deposited on surface-textured glass/ZnO substrates[J]. Solar Energy Materials and Solar Cells, 2005, 85(1): 1-11.
6. SAI H, FUJIWARA H, KONDO M. Back surface reflectors with periodic textures fabricated by self-ordering process for light trapping in thin-film microcrystalline silicon solar cells[J]. Solar Energy Materials and Solar Cells, 2009, 93(6-7): 1087-1090.
7. HAASE C, STIEBIG H. Thin-film silicon solar cells with efficient periodic light trapping texture[J]. Applied Physics Letters, 2007, 91(6): 061116.
8. CHO J S, BAEK S H, YOON K H. Enhancement of light trapping by textured back electrodes in tandem micromorph n-i-p silicon thin film solar cells[J]. Current Applied Physics, 2011, 11(1): S2-S7.
9. CALNAN S, TIWARI A N. High mobility transparent conducting oxides for thin film solar cells[J]. Thin Solid Films, 2010, 518(7): 1839-1849.
10. TARK S J, KANG M G, PARK S, et al. Development of surface-textured hydrogenated ZnO:Al thin-films for μc-Si solar cells[J]. Current Applied Physics, 2009, 9(6): 1318-1322.
11. YOO J S, LEE J H, KIM S K, et al. High transmittance and low resistive ZnO:Al films for thin film solar cells[C]. Proceedings of Symposium O on Thin Film Chalcogenide Photovoltaic Material, EMRS 2004 Conference, Strasbourg, France, May 24-28, 2005, 480-481: 213-217.
12. SOBAJIMA Y, KATO S, MATSUURA T, et al. Study of the light-trapping effects of textured ZnO:Al/glass structure TCO for improving photocurrent of a-Si:H solar cells[J]. Journal of Materials Science: Materials in Electronics, 2007, 18(1): S159-S162.
13. KRĈ J C, ZEMAN M, KLUTH O, et al. Effect of surface roughness of ZnO:Al films on light scattering in hydrogenated amorphous silicon solar cells[J]. Thin Solid Films, 2003, 426: 296-304.
14. LEE J C, DUTTA V, YOON K H, et al. Superstrate p-i-n a-Si:H solar cells on textured ZnO:Al front transparent conduction oxide[J]. Superlattices and Microstructures, 2007, 42: 369-374.