A fluidic bridge based MEMS paramagnetic oxygen sensor

Sensors and Actuators, B: Chemical

Volumn 188, Issue , 2013, Pages 22-30

  Vonderschmidt, Stefan ^a   Müller, Jörg ^a  

^a HAMBURG UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Fluidic bridge; MEMS; Paramagnetic oxygen sensor; Thermoanemometer

Indexed keywords

IN-PLANE MAGNETIC FIELDS; MEASUREMENT CHANNELS; MEMS TECHNOLOGY; PARALLEL CHANNEL; REFERENCE CHANNELS; THERMO-ANEMOMETERS; THERMOANEMOMETER; UNDISTURBED FLOWS;

BRIDGE CIRCUITS; MEMS; OXYGEN SENSORS; SENSORS;

PARAMAGNETISM;

EID: 84881350418     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2013.07.019     Document Type: Article

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