MEMS based paramagnetic oxygen measurement

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 2393-2396

  Krippner, P ^a   Wetzko, M ^a   Szasz, P ^a   Andres, B ^b   Bauer, T ^b  

^a ABB CORPORATE RESEARCH   (Germany)

^b ABB Automation GmbH   (Germany)

Author keywords

DRIE; Micromechanical silicon chip; Oxygen concentration measurement; Paramagnetic

Indexed keywords

ACTUATORS; CHEMICAL PROPERTIES; COMPOSITE MICROMECHANICS; CONCENTRATION (PROCESS); MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; NONMETALS; OXYGEN; TRANSDUCERS;

BATCH PROCESSING; DRIE; IMPROVED PERFORMANCE; INTERNATIONAL CONFERENCES; MANUAL ASSEMBLY; MECHANICAL MEASUREMENTS; MICRO-MECHANICAL; MICROMECHANICAL SILICON CHIP; OXYGEN CONCENTRATION MEASUREMENT; OXYGEN CONCENTRATIONS; OXYGEN MEASUREMENTS; PARAMAGNETIC; SENSOR CHIPS; SOLID-STATE SENSORS;

SENSORS;

EID: 50149119339     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300652     Document Type: Conference Paper

References (5)

1. W. Schäfer, "Chemische Sensoren", Sensoren in der Automatisierungstechnik, Vieweg Verlag, Wiesbaden, 1993.
2. A. Vogel, D. Binz, M. Wetzko, P. Krippner, "Device for measuring the oxygen concentration in gases, US patent 6739179, 2004.
3. T. Bauer, A. Vogel, P. Krippner, M. Wetzko, C. Schmidt, A. Ruzzu, R. Merte, "Device for suspension of a sample body", US patent 7040140, 2006.
4. 2 MEMS Sensor", Proc. of MSM Int. Conf. on Modeling and Simulation of Microsystems, pp. 297-282, 2002.
5. P.Krippner, M. Wetzko, P. Szasz, B. Andres, T. Bauer, "Microsystems at work", ABB Review 4/2006, pp.68-73, 2006