Novel chemical route to size-controlled Ta(0) and Ru-Ta nanoparticles in ionic liquids

Materials Research Society Symposium Proceedings

Volumn 1473, Issue , 2012, Pages 26-31

  Helgadottir, Inga S ^a,b   Arquillière, Philippe P ^a,b   Campbell, Paul S ^a   Santini, Catherine C ^a   Haumesser, P H ^b  

^a UMR 5265   (France)

^b CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ROUTES; IMIDAZOLIUM-BASED IONIC LIQUID; METALLIC NANOPARTICLES; MICROELECTRONICS INDUSTRY; MONO-DISPERSE; ROOM TEMPERATURE; SYNTHESISED; SYNTHETIC ROUTES;

FUNCTIONAL MATERIALS; IONIC LIQUIDS; METAL NANOPARTICLES; MICROELECTRONICS; RUTHENIUM; SYNTHETIC METALS;

TANTALUM;

EID: 84879864031     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/opl.2012.1518     Document Type: Conference Paper

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