Computational simulation of block copolymer directed self-assembly in small topographical guiding templates

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8680, Issue , 2013, Pages

  Yi, He ^a,b   Latypov, Azat ^a   Wong, H S Philip ^b  

^a IBM MICROELECTRONICS   (United States)

^b Stanford University   (United States)

Author keywords

BCP; Block copolymers; Directed self assembly; DSA

Indexed keywords

BCP; COMPUTATIONAL SIMULATION; DIRECTED SELF-ASSEMBLY; DSA; EQUILIBRIUM BEHAVIOR; NEXT GENERATION LITHOGRAPHY; PARAMETER VALUES; PARAMETRIC STUDY;

POLYMER FILMS; SELF ASSEMBLY;

BLOCK COPOLYMERS;

EID: 84878412602     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.2011264     Document Type: Conference Paper

References (7)

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