-
1
-
-
79955907720
-
Self-assembly patterning for sub-15nm half-pitch: A transition from lab to fab
-
Bencher, C., Smith, J., Miao, L., Cai, C., Chen, Y., Cheng, J. Y, Sanders, D.P., Tjio, M., Truong, H. D., Holmes, S. and Hinsberg, W. D, "Self-assembly patterning for sub-15nm half-pitch: a transition from lab to fab," Proc. SPIE 7970, 79700F (2011).
-
(2011)
Proc. SPIE
, vol.7970
-
-
Bencher, C.1
Smith, J.2
Miao, L.3
Cai, C.4
Chen, Y.5
Cheng, J.Y.6
Sanders, D.P.7
Tjio, M.8
Truong, H.D.9
Holmes, S.10
Hinsberg, W.D.11
-
2
-
-
84894416283
-
-
www.itrs.net/Links/2011ITRS/2011Chapters/2011ERM.pdf
-
-
-
-
3
-
-
70350222072
-
Simulations of theoretically informed coarse grain models of polymeric systems
-
Detcheverry, F. A., Pike, D. Q., Nealey, P. F., Muller, M. and de Pablo, J. J., "Simulations of theoretically informed coarse grain models of polymeric systems," Faraday Discuss. 144, 111-125 (2010).
-
(2010)
Faraday Discuss.
, vol.144
, pp. 111-125
-
-
Detcheverry, F.A.1
Pike, D.Q.2
Nealey, P.F.3
Muller, M.4
De Pablo, J.J.5
-
4
-
-
49649099742
-
Density multiplication and improved lithography by directed block copolymer assembly"
-
Ruiz, R., Kang, H., Detcheverry, F. A., Dobisz, E., Kercher, D. S., Albrecht, T. R., de Pablo, J. J. and Nealey, P. F., "Density multiplication and improved lithography by directed block copolymer assembly", Science 321, 936-939 (2008).
-
(2008)
Science
, vol.321
, pp. 936-939
-
-
Ruiz, R.1
Kang, H.2
Detcheverry, F.A.3
Dobisz, E.4
Kercher, D.S.5
Albrecht, T.R.6
De Pablo, J.J.7
Nealey, P.F.8
-
5
-
-
49649127635
-
Graphoepitaxy of self-assembled block copolymers on 2D periodic patterned templates
-
Bita, I., Yang, J. K. W., Jung. Y. S., Ross, C. A., Thomas, E. L. and Berggren, K. K., "Graphoepitaxy of self-assembled block copolymers on 2D periodic patterned templates," Science 321, 939-943 (2008).
-
(2008)
Science
, vol.321
, pp. 939-943
-
-
Bita, I.1
Yang, J.K.W.2
Jung, Y.S.3
Ross, C.A.4
Thomas, E.L.5
Berggren, K.K.6
-
6
-
-
84861048500
-
Comparison of directed self-assembly integrations
-
in priting
-
Somervell, M. H., Gronheid, R., Hooge, J. S., Nafus, K., Rincon Delgadillo, P. A., Younkin, T. R., Rathsack, B. M., Scheer, S. A. and Nealey, P. F., "Comparison of directed self-assembly integrations", Proc. SPIE, in priting (2012).
-
(2012)
Proc. SPIE
-
-
Somervell, M.H.1
Gronheid, R.2
Hooge, J.S.3
Nafus, K.4
Rincon Delgadillo, P.A.5
Younkin, T.R.6
Rathsack, B.M.7
Scheer, S.A.8
Nealey, P.F.9
-
7
-
-
69549137859
-
Theoretically informed coarse grain simulations of polymeric systems
-
Pike, D. Q., Detcheverry, F. A., Meuller, M. and de Pablo, J. J., "Theoretically informed coarse grain simulations of polymeric systems," J. Chem. Phys. 131, 084903 (2009).
-
(2009)
J. Chem. Phys.
, vol.131
, pp. 084903
-
-
Pike, D.Q.1
Detcheverry, F.A.2
Meuller, M.3
De Pablo, J.J.4
-
9
-
-
84894488761
-
-
www.gpgpu.org
-
-
-
-
10
-
-
67349267818
-
GPU accelerated Monte Carlo simulation of the 2D and 3D Ising model
-
Preis, T., Virnau, P., Paul, W. and Schneider, J. J., "GPU accelerated Monte Carlo simulation of the 2D and 3D Ising model," J. Comp. Phys. 228, 4468-4477 (2009).
-
(2009)
J. Comp. Phys.
, vol.228
, pp. 4468-4477
-
-
Preis, T.1
Virnau, P.2
Paul, W.3
Schneider, J.J.4
-
13
-
-
77951616272
-
Interpolation in the Directed Assembly of Block Copolymers on Nanopatterned Substrates: Simulation and Experiments
-
Detcheverry, F. A., Liu, G., Nealey, P. F. and de Pablo, J. J., "Interpolation in the Directed Assembly of Block Copolymers on Nanopatterned Substrates: Simulation and Experiments," Macromolecules 43, 3446-3454 (2010).
-
(2010)
Macromolecules
, vol.43
, pp. 3446-3454
-
-
Detcheverry, F.A.1
Liu, G.2
Nealey, P.F.3
De Pablo, J.J.4
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