-
3
-
-
0033314351
-
Meso-scale elctro-magnetically actuated normally closed valve realized on LTCC-tapes
-
M. Gongora-Rubio, L. Sola-Laguna, M. A. Smith, and J. J. Santiago-Aviles. Meso-scale elctro-magnetically actuated normally closed valve realized on LTCC-tapes. In Proceedings of the SPIE, volume 3877, 1999.
-
(1999)
Proceedings of the SPIE
, vol.3877
-
-
Gongora-Rubio, M.1
Sola-Laguna, L.2
Smith, M.A.3
Santiago-Aviles, J.J.4
-
4
-
-
0345504149
-
The utilization of low temperature co-fired ceramics (LTCC-ML) technology for meso-scale EMS, a simple thermistor based flow sensor
-
M. Gongora-Rubio, L. M. Sola-Laguna, P. J. Moffett, and J. J. Santiago-Aviles. The utilization of low temperature co-fired ceramics (LTCC-ML) technology for meso-scale EMS, a simple thermistor based flow sensor. Sensors and Actuators A, 73:215-221, 1999.
-
(1999)
Sensors and Actuators A
, vol.73
, pp. 215-221
-
-
Gongora-Rubio, M.1
Sola-Laguna, L.M.2
Moffett, P.J.3
Santiago-Aviles, J.J.4
-
6
-
-
84878253278
-
Components for parallel optical networks based on LIGA technology
-
J. Hossfeld,W. Ehrfeld, M. Neumeier, A. Picard, J. Schulze, and L. Weber. Components for Parallel Optical Networks Based on LIGA Technology. In Micro Systems Technologies 98, pages 89-94, 1998.
-
(1998)
Micro Systems Technologies 98
, pp. 89-94
-
-
Hossfeld, J.1
Ehrfeld, W.2
Neumeier, M.3
Picard, A.4
Schulze, J.5
Weber, L.6
-
7
-
-
0032092897
-
The dynamic micro-pump driven with a screen printed PZT actuator
-
M. Koch, A. G. R. Evans, and A. Brunnschweiler. The dynamic micro-pump driven with a screen printed PZT actuator. J. Micromech. Microeng., 8:119-122, 1998.
-
(1998)
J. Micromech. Microeng.
, vol.8
, pp. 119-122
-
-
Koch, M.1
Evans, A.G.R.2
Brunnschweiler, A.3
-
8
-
-
0033331451
-
Laminated ceramic components for microfluidic applications
-
D. W. Matson, P. M. Martin, W. D. Benett, D. C. Stewart, and C. C. Bonham. Laminated ceramic components for microfluidic applications. In Proceedings of the SPIE, volume 3877, pages 95-100, 1999.
-
(1999)
Proceedings of the SPIE
, vol.3877
, pp. 95-100
-
-
Matson, D.W.1
Martin, P.M.2
Benett, W.D.3
Stewart, D.C.4
Bonham, C.C.5
-
9
-
-
84872959299
-
Biological characterization of commercially low temperature cofiring ceramics
-
23-25 June
-
L. Rebenklau, J. Uhlemann, M. Thümmler, and K.-J. Wolter. Biological Characterization of Commercially Low Temperature Cofiring Ceramics. In Proceedings of the 14th European Microelectronics and Packaging Conference, Friedrichshafen, Germany, pages 325-330, 23-25 June 2003.
-
(2003)
Proceedings of the 14th European Microelectronics and Packaging Conference, Friedrichshafen, Germany
, pp. 325-330
-
-
Rebenklau, L.1
Uhlemann, J.2
Thümmler, M.3
Wolter, K.-J.4
-
10
-
-
0034482535
-
Realization of hybrid microfluidic systems using standard LTCC process
-
Las Vegas, Nevada, USA, May
-
L. Rebenklau, K.-J. Wolter, and S. Howitz. 'Realization of Hybrid Microfluidic Systems using standard LTCC Process. In Proceedings 50th Electronic Components and Technology Conference, pages 1696-1700, Las Vegas, Nevada, USA, May 2000.
-
(2000)
Proceedings 50th Electronic Components and Technology Conference
, pp. 1696-1700
-
-
Rebenklau, L.1
Wolter, K.-J.2
Howitz, S.3
-
11
-
-
0010956331
-
Strategies for LIGA implementation
-
V. Salle. Strategies for LIGA Implementation. In Microsystems Technologies 98, pages 25-30, 1998.
-
(1998)
Microsystems Technologies 98
, pp. 25-30
-
-
Salle, V.1
-
12
-
-
0033138321
-
Design and fabrication of a microfluidic circuitboard
-
C. G. J. Schabmüller, M. Koch, A. G. R. Evans, and A. Brunnschweiler. Design and fabrication of a microfluidic circuitboard. J. Micromech. Microeng., 9:176-179, 1999.
-
(1999)
J. Micromech. Microeng.
, vol.9
, pp. 176-179
-
-
Schabmüller, C.G.J.1
Koch, M.2
Evans, A.G.R.3
Brunnschweiler, A.4
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