Development of LTCC smart channels for integrated chemical, temperature, and flow sensing

IMAPS/ACerS - 2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2006

Volumn , Issue , 2006, Pages 239-248

  Ho, Clifford K ^a   Peterson, Kenneth A ^a   McGrath, Lucas K ^a   Turner, Timothy S ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Anemometry; Chemiresistor; LTCC; Smart channels; Thermistor

Indexed keywords

ANEMOMETRY; APPLICATION REQUIREMENTS; CHEMICAL CONCENTRATIONS; CHEMIRESISTORS; ELECTRICAL RESISTANCES; LOW-TEMPERATURE CO-FIRED CERAMIC MATERIALS; LTCC; SMART CHANNELS;

ANEMOMETERS; CERAMIC PRODUCTS; CHEMICAL SENSORS; ELECTRIC HEATING ELEMENTS; EXHIBITIONS; FABRICATION; FLOW RATE; MICROSYSTEMS; THERMISTORS; TUBES (COMPONENTS); VOLATILE ORGANIC COMPOUNDS;

POLYMERS;

EID: 84878216431     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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