Arrays of cricket-inspired sensory hairs with capacitive motion detection

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 646-649

  Van Baar, J ^a   Dijkstra, M ^a   Wiegerink, R ^a   Lammerink, T ^a   De Boer, R ^a   Krijnen, G ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; CAPACITANCE; ELECTRIC POTENTIAL; ELECTRODES; PHOTORESISTORS; SILICON NITRIDE; SILICON WAFERS;

FLOW SENSORS; PHOTORESIST LAYERS;

SILICON SENSORS;

EID: 26844492207     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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