Ultrapurity and energy use: Case study of semiconductor manufacturing

Thermodynamics and the Destruction of Resources

Volumn 9780521884556, Issue , 2011, Pages 190-211

  Williams, Eric ^a   Krishnan, Nikhil ^b   Boyd, Sarah ^c  

^a Arizona State University   (United States)

^b MCKINSEY AND COMPANY   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMOBILE MANUFACTURE; DISTILLATION; ENERGY UTILIZATION; ENTROPY; MANUFACTURE; SEMICONDUCTOR DEVICE MANUFACTURE; THERMODYNAMICS;

MANUFACTURING PROCESS; PHARMACEUTICAL MANUFACTURING; PROCESSING ENVIRONMENTS; PRODUCTS AND SERVICES; SECOND LAW OF THERMODYNAMICS; SEMICONDUCTOR MANUFACTURING; TECHNOLOGICAL PROGRESS; TRADITIONAL INDUSTRY;

PURIFICATION;

EID: 84876304412     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1017/CBO9780511976049.011     Document Type: Chapter

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