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Energy Procedia

Volumn 27, Issue , 2012, Pages 567-572

Epoxy-induced spalling of silicon

(7) Martini, R a,b Gonzalez, M b Dross, F b Masolin, A a,b Vaes, J b Frederickx, D b Poortmans, J a,b

a UNIVERSITY OF LEUVEN (Belgium)

b IMEC (Belgium)

Author keywords

Controled spalling; Kerf free wafering

Indexed keywords

EID: 84875872318 PISSN: 18766102 EISSN: None Source Type: Conference Proceeding
DOI: 10.1016/j.egypro.2012.07.111 Document Type: Conference Paper

Times cited : (37)

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