Stress-induced large-area lift-off of crystalline Si films

Applied Physics A: Materials Science and Processing

Volumn 89, Issue 1, 2007, Pages 149-152

  Dross, F ^a   Robbelein, J ^a   Vandevelde, B ^a   Van Kerschaver, E ^a   Gordon, I ^a   Beaucarne, G ^a   Poortmans, J ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; ENERGY CONVERSION; SILICON; SUBSTRATES; THERMAL EXPANSION;

CRYSTALLINE SI FILMS; DIFFERENTIAL CONTRACTION; ENERGY CONVERSION EFFICIENCY; LARGE-AREA LIFT-OFF;

THICK FILMS;

EID: 36048941738     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-007-4195-2     Document Type: Article

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