Progress in silicon heterojunction solar cell fabrication with rear laser-fired contacts

Proceedings of the 2013 Spanish Conference on Electron Devices, CDE 2013

Volumn , Issue , 2013, Pages 345-348

  Morales Vilches, A ^a   Voz, C ^a   Colina, M ^a   Lopez, G ^a   Martin, I ^a   Orpella, A ^a   Puigdollers, J ^a   Garcia, M ^a   Alcubilla, R ^a  

^a UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

Author keywords

heterojunction; passivation; solar cells plasma enhanced chemical vapor deposition

Indexed keywords

CRYSTALLINE SILICONS; DEPOSITION CONDITIONS; FABRICATION PROCESS; HYDROGENATED AMORPHOUS SILICON (A-SI:H); LASER-FIRED CONTACTS; LOW- TEMPERATURE PROCESS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITIONS (PE CVD); SILICON HETEROJUNCTIONS;

AMORPHOUS SILICON; ELECTRON DEVICES; FABRICATION; HETEROJUNCTIONS; HYDROGENATION; PASSIVATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON; SOLAR CELLS; SUBSTRATES; TEMPERATURE; VAPORS;

SILICON WAFERS;

EID: 84875735380     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/CDE.2013.6481413     Document Type: Conference Paper

References (5)

1. S. De Wolf, A. Descoeudres, Z.C. Holman and C. Ballif, Green 2, (2012) 7.
2. M. Taguchi M. Tanaka, T. Matsuyama, T. Matsuoka, S. Tsuda, S. Nakano, Y. Kishi and Y. Kuwano, Technological Digest 5th International Photovoltaic Science and Engineering Conference, (1990) 689.
3. I. Martín, P. Ortega, M. Colina, A. Orpella, G. López, R. Alcubilla, Prog. Photovolt: Res. Appl. (2012) Doi: 10.1002/pip.2207.
4. P. Ortega, A. Orpella, I. Martín, M. Colina, G. López, C. Voz, M. I. Sánchez, C. Molpeceres and R. Alcubilla, Prog. Photovolt: Res. Appl. 20, (2012) 173.
5. R.A. Sinton, A. Cuevas, Appl. Phys. Lett. 69 (1996) 2510