Application of image entropy evaluation function for the leveling of large aperture components in auto defects detecting

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8417, Issue , 2012, Pages

  Cao, Pin ^a   Liu, Dong ^a   Zhao, Peng ^a   Yang, Yong Ying ^a   Wang, Shi Tong ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Defect detection; focusing; image entropy; large aperture components; leveling

Indexed keywords

DARK-FIELD SCATTERINGS; DEFECT DETECTION; DIGITAL IDENTIFICATION; EVALUATION FUNCTION; FOCUSING EVALUATION FUNCTIONS; IMAGE ENTROPY; IMAGE INFORMATION ENTROPY; LARGE APERTURE;

CURVE FITTING; FOCUSING; IMAGING SYSTEMS; LEVELING (MACHINERY); MANUFACTURE; OPTICAL TESTING;

MICROSCOPES;

EID: 84875589298     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.976036     Document Type: Conference Paper

References (7)

1. DAI Ming-kui, XU De-yan, The optical component's defects detection and research status, Optical Instruments, 1996(3) 33-36.
2. WANG Feng-quan, YANG Yong-ying, Research of digital in spection system of precise surface defect, Optical Instruments, 2006(3)71-75.
3. ZAO Hui, BAO Ge-tang, TAO Wei, Experimental research and analysis of automatic focusing function for imaging measurement, Optic and Precision Engineering, 2004(5)531-536.
4. A. Santos, C. Ortis Desolorzano, J.J. Vaquero et al, Evaluation of auto-focus function in molecular cytogenetic analysis, Journal of Miscroscopy, 1997(3)264-272.
5. KANG Zong-ming, ZHANG Li, XIE Pan, Implementation of an automatic focusing algorithm based on spatial high frequency energy and entropy, Acta Electronica Sinica, 2003(4)552-555.
6. ZHU Zheng-tao, LI Shao-fa, Research on auto-focused function based on the image entropy, Optics and Precision Engineering, 2004(5) 537-542.
7. YANG Yong-ying, GAO Xin, XIAO Bing et al, Optical microscopic imaging and digitized evaluation system for super-smooth surface defects, Infrared and Laser Engineering, 2010(2)325-329.