Optical microscopic imaging and digitized evaluation system for super-smooth surface defects

Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering

Volumn 39, Issue 2, 2010, Pages 325-329

  Yang, Yong Ying ^a   Gao, Xin ^a   Xiao, Bing ^a   Liu, Dong ^a   Zhuo, Yong Mo ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Feature classification; Image mosaic; Microscopic scattering imaging; Optical testing; Surface defects

Indexed keywords

BINARY OPTICS; DIGITAL IMAGE; EVALUATION SYSTEM; EXPANSION METHODS; FEATURE CLASSIFICATION; IMAGE MOSAIC; IMAGE MOSAIC ALGORITHMS; LARGE APERTURE; LED LIGHT SOURCE; MICROSCOPE SYSTEMS; MICROSCOPIC IMAGING; MICROSCOPIC SCATTERING; MICROSCOPIC SCATTERING IMAGING; MULTI-BEAM; MULTI-CYCLE; OVERLAPPING REGIONS; RING DISTRIBUTIONS; SCANNING SYSTEMS; SMOOTH SURFACE; SUBAPERTURE;

DIGITAL IMAGE STORAGE; EDGE DETECTION; IMAGING SYSTEMS; LIGHT MEASUREMENT; LIGHT SOURCES; MICROSCOPIC EXAMINATION; OPTICAL TESTING; SCATTERING; SURFACE TESTING;

SURFACE DEFECTS;

EID: 77953972620     PISSN: 10072276     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)

1. ISO 10110-7: 2008(E).Optics and photonics-Preparation of drawings for optical elements and systems-part 7: surface imperfection tolerances[S]. Geneva: International Standard Organization, 2008.
2. Dai Ming-Kui, Xu De-Yan. The present situation of imperfection testing and research on the optical component[J]. Optical Instruments 1996, 18(4): 32-39.(in Chinese)
3. Yang Yong-Ying, Lu Chun-Hua, Liang Jiao, et al. Microscopic dark-field scattering imaging and digitalization evaluation system of defects on optical devices precision surface[J]. Acta Optica Sinica( 2007, 27(6): 1031-1038.(in Chinese)
4. Wang Feng-Quan, Yang Yong-Ying, Sun Dan-Dan, et al. Digital realization of precision surface defect evaluation system[C]// SPIE, 2006, 6150: 61500F-1-61500F-5.
5. Liu Xu, Yang Yong-Ying, Liu Dong, et al. Error analysis of sub-aperture synthesis for detecting surface defects of optical components[J]. Journal of Optoelectronics Laser 2008, 19(8): 1088-1093.(in Chinese)
6. Di Hui, Yu Qi-Feng, Zhang Xiao-Hu. An algorithm for infrared image enhancement based on gray scale transform[J]. Journal of Applied Optic, 2006, 27(2): 12-14.
7. Qu Xing-Hua, He Ying, Han Feng, et al. Iilumination system for detecting random defects on strongly reflective and complex surfaces[J]. Acta Optica Sinca 2003, 23(5): 547-551.(in Chinese)
8. Ge Wen-Qian, Zhao Hui-Jie. Measure system of surface flaw and contour dimension curvature bitty part[J]. Infrared and Laser Engineering 2008, 37(S): 274-278.(in Chinese)