Methods for the microfabrication of magnesium

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2013, Pages 347-350

  Tsang, Melissa ^a   Herrault, Florian ^b   Shafer, Richard H ^b   Allen, Mark G ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ETCHING; ELECTRICAL RESISTIVITY; ELECTROPLATED MATERIALS; ENERGY STORAGE APPLICATIONS; FABRICATION TECHNOLOGIES; FILM TECHNOLOGY; MINIMUM FEATURE SIZES; NONAQUEOUS SOLUTIONS;

ELECTRIC CONDUCTIVITY; ELECTROPLATING; MEMS; MICROANALYSIS; MICROFABRICATION; THICK FILMS;

MAGNESIUM;

EID: 84875453639     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2013.6474249     Document Type: Conference Paper

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