LTCC ultra high isostatic pressure sensors

16th European Microelectronics and Packaging Conference and Exhibition 2007, EMPC 2007

Volumn , Issue , 2007, Pages 370-375

  Maeder, Th ^a   Afra, B ^a   Fournier, Y ^a   Johner, N ^a   Ryser, P ^a  

^a EPFL   (Switzerland)

Author keywords

High pressure sensor; LTCC; Piezoresistivity; Thick film

Indexed keywords

DEFORMABLE STRUCTURES; HIGH PRESSURE SENSORS; LOW TEMPERATURE CO-FIRED CERAMICS; LTCC; PIEZORESISTIVE PRESSURE SENSORS; PIEZORESISTIVITY; SENSING ELEMENTS; SENSOR ELEMENTS;

EXHIBITIONS; HIGH PRESSURE ENGINEERING; MATERIALS PROPERTIES; MEMBRANES; MICROELECTRONICS; THICK FILMS;

PRESSURE SENSORS;

EID: 84875304933     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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