Fabrication and testing of ISFET based pH sensors for microliter target solutions

Sensors and Actuators, A: Physical

Volumn 194, Issue , 2013, Pages 181-187

  Dong, Zhuxin ^a   Wejinya, Uchechukwu C ^a   Elhajj, Imad H ^b  

^a University of Arkansas   (United States)

^b AMERICAN UNIVERSITY OF BEIRUT   (Lebanon)

Author keywords

ISFET; MEMS; Microliter; pH

Indexed keywords

BIOLOGY AND MEDICINE; FABRICATION METHOD; INDUSTRIAL WASTEWATERS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MICROLITERS; MONITORING AND CONTROLLING; RESEARCH APPLICATIONS; TREATMENT PROCESS;

INDUSTRIAL RESEARCH; ION SENSITIVE FIELD EFFECT TRANSISTORS; MEMS; PH SENSORS; WATER QUALITY;

PH;

EID: 84874860431     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2013.02.008     Document Type: Article

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