Very low drift and high sensitivity of nanocrystal-TiO 2 sensing membrane on pH-ISFET fabricated by CMOS compatible process

Applied Surface Science

Volumn 267, Issue , 2013, Pages 206-211

  Bunjongpru, W ^a,c   Sungthong, A ^e   Porntheeraphat, S ^a,b   Rayanasukha, Y ^c   Pankiew, A ^a,c   Jeamsaksiri, W ^a   Srisuwan, A ^a   Chaisriratanakul, W ^a   Chaowicharat, E ^a   Klunngien, N ^a   Hruanun, C ^a   Poyai, A ^a   Nukeaw, J ^c,d  

^a Thai Microelectronics Center TMEC   (Thailand)

^b NATIONAL ELECTRONICS AND COMPUTER TECHNOLOGY CENTER   (Thailand)

^c KING MONGKUT'S INSTITUTE OF TECHNOLOGY LADKRABANG   (Thailand)

^d Thailand Ministry of Science and Technology   (Thailand)

^e RAJABHAT RAJANAGARINDRA UNIVERSITY   (Thailand)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ANNEALING; AUGER ELECTRON SPECTROSCOPY; CMOS INTEGRATED CIRCUITS; ELECTROLYTES; FILM PREPARATION; ION SENSITIVE FIELD EFFECT TRANSISTORS; METALLIC FILMS; NANOCRYSTALS; PH SENSORS; SCANNING ELECTRON MICROSCOPY; SILICA; THIN FILMS; TIN; TITANIUM DIOXIDE; TITANIUM NITRIDE; X RAY DIFFRACTION;

ANNEALING TEMPERATURES; CRYSTALLINE PHASE TRANSITION; ELECTROLYTE INSULATOR SEMICONDUCTORS; HYSTERESIS VOLTAGE; MORPHOLOGICAL FEATURES; REACTIVE DC MAGNETRON SPUTTERING; SENSING CHARACTERISTICS; SENSING MEMBRANES;

FABRICATION;

EID: 84873725717     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2012.10.176     Document Type: Article

References (12)

1. P. Bergveld Development of an ion sensitive solid-state device for neurophysiological measurement IEEE Transactions on Biomedical Engineering BME-17 1970 70 71
2. T. Mastsuo, and K.D. Wise IEEE Transactions on Biomedical Engineering 21 1947 485
3. P.V. Bobro, Y.A. Tarantov, S. Krause, and W. Moritz Sensors and Actuators B3 1991 75
4. H.V.D. Vlekkert, L. Bousse, and N. De Rooij Journal of Colloid and Interface Science 122 1991 75
5. A. Fog, and R. Buck Electronic semiconducting oxides as pH sensors Sensors and Actuators 5 1984 137 146
6. J.B. Goodenough, A. Hamnett, and Q. Madelung L. Bornstein, III-Semiconductors 1984 Springer-Verlag Berlin, Germany
7. Y. Suda, H. Kawasaki, T. Ueda, and T. Ohshima Thin Solid Films 453-454 2004 162 166
8. Z. Liu, and G. Welsch Literature survey on diffusivities of oxygen Metallurgical and Materials Transactions A 19 4 2012 1121 1125
9. Y. Koizumi, M. Kishimoto, Y. Minamino, and H. Nakajima Philosophical Magazine 88 24 2008
10. S. Zerkouta, S. Achoura, A. Mosserb, and N. Tabetc On the existence of superstructure in TiNx thin films Thin Solid Films 441 2003 135 139
11. C.D. Fung, P.W. Cheung, and W.H. Ko A generalized theory of an electrolyte-insulator-semiconductor field-effect transistor IEEE Transactions on Electron Devices 33 1986 8 18
12. 3 sensing membrane-based electrolyte-insulator-semiconductor for pH detection Journal of Physical Chemistry 113 2009 21937 21940