Characteristics of a monolithically integrated micro-displacement sensor

14th Joint International IMEKO TC1, TC7, TC13 Symposium on Intelligent Quality Measurements - Theory, Education and Training 2011, Held in Conj. with the 56th IWK Ilmenau University of Technology

Volumn , Issue , 2011, Pages 133-138

  Takeshita, Toshihiro ^a   Peng, Yao ^a   Morita, Nobutomo ^a   Ando, Hideyuki ^b   Higurashi, Eiji ^c   Sawada, Renshi ^a  

^a KYUSHU UNIVERSITY   (Japan)

^b FUZZY LOGIC SYSTEMS INSTITUTE   (Japan)

^c UNIVERSITY OF TOKYO   (Japan)

Author keywords

Control micro mirror device; Displacement sensor; Optical MEMS

Indexed keywords

CONCENTRIC CIRCLES; COVER GLASS; DISPLACEMENT SENSOR; LASER TRIANGULATION; LINEAR DISPLACEMENTS; MEMS TECHNOLOGY; MICRO MIRROR; MICRODISPLACEMENT; MIRROR REFLECTIVITY; MIRROR TILT; MONOLITHICALLY INTEGRATED; SIMPLE STRUCTURES; VERTICAL-CAVITY SURFACE EMITTING LASER;

DIODES; LASERS; MEMS; MIRRORS; MOEMS; MONOLITHIC INTEGRATED CIRCUITS; REFLECTION; SENSORS;

ENGINEERING EDUCATION;

EID: 84872503568     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. S V Mikhlyaev, Influence of a Tilt of Mirror Surface on the Measurement Accuracy of Laser Triangulation Rangefinder, 2006 J. Phys.: Conf. Ser. 48 739
2. I. Ishikawa, R.Sawada, E.Higurashi, Integrated microdisplacement sensor that measures tilting angle and linear movement of an external mirror, Sensor and Actuators. A138 (2007) 269-275
3. T. Ito, R. Sawada, E. Higurashi, Integrated microdisplacement sensor that uses beam divergence, J. Micromech. Microeng. 13 (2003) 942-947.
4. T.Akase, R.SAWADA, E. Higurashi, T. Kobayashi, R. Maeda, M.Inokuchi, S. Sanada, and I. Ishikawa, Combined Device of Optical Microdisplacement Sensor and PZT-Actuated Micromirror, IEEE/LEOS International Conference on Optical MEMS & Nanophotonics 2007, (12-16.Aug.,2007, Hualien, Taiwan),ThB5, pp.199-200