High-quality LiNbO3 microdisk resonators by undercut etching and surface tension reshaping

Optics Express

Volumn 20, Issue 27, 2012, Pages 28119-28124

  Wang, Tzyy Jiann ^a   He, Jheng Yu ^a   Lee, Cheng An ^a   Niu, Huan ^b  

^a NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FINITE ELEMENT METHOD; HEAT TREATMENT; ION IMPLANTATION; SURFACE TENSION;

CHEMICAL ETCHING; HIGH QUALITY; LATTICE DAMAGE; MICRODISK RESONATORS; MICRODISK STRUCTURES; MICRODISKS; Q-FACTORS; RESONANT CHARACTERISTICS; UNDERCUT ETCHING;

RESONATORS;

LITHIUM NIOBATE; NIOBIUM; OXIDE;

ARTICLE; CHEMISTRY; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; EQUIPMENT FAILURE; REFRACTOMETRY; SURFACE PLASMON RESONANCE; SURFACE TENSION; TRANSDUCER;

EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MINIATURIZATION; NIOBIUM; OXIDES; REFRACTOMETRY; SURFACE PLASMON RESONANCE; SURFACE TENSION; TRANSDUCERS;

EID: 84872031956     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.20.028119     Document Type: Article

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