Micromachining of copper by femtosecond laser pulses

Applied Surface Science

Volumn 265, Issue , 2013, Pages 302-308

  Wang, S Y ^a   Ren, Y ^b   Cheng, C W ^a   Chen, J K ^b   Tzou, D Y ^b  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^b University of Missouri   (United States)

Author keywords

Femtosecond laser; Material ablation; Phase explosion; Superheating; Two temperature model

Indexed keywords

ABLATION; COPPER; FEMTOSECOND LASERS; LASER ABLATION; LASER PULSES; SAPPHIRE;

MATERIAL ABLATION; METASTABLE LIQUID; PHASE EXPLOSION; PREDICTIVE MODELING; SUPERHEATING; TI: SAPPHIRE LASER; TWO TEMPERATURE MODEL; ULTRASHORT-PULSED LASER;

PULSED LASERS;

EID: 84871933457     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2012.10.200     Document Type: Article

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