Ion conduction in nanoscale yttria-stabilized zirconia fabricated by atomic layer deposition with various doping rates

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 31, Issue 1, 2013, Pages

  Sik Son, Kyung ^a   Bae, Kiho ^a   Woo Kim, Jun ^a   Suk Ha, Jeong ^a   Hyung Shim, Joon ^a  

^a Korea University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

IN-PLANE CONDUCTIVITY; ION CONDUCTION; NANO SCALE; ORDERS OF MAGNITUDE; VERTICAL DIRECTION; YSZ FILMS;

SEMICONDUCTOR DOPING; YTTRIA STABILIZED ZIRCONIA; YTTRIUM ALLOYS; ZIRCONIA;

ATOMIC LAYER DEPOSITION;

EID: 84871853454     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.4755921     Document Type: Article

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