SIMS depth profiling of implanted helium in pure iron using CsHe + detection mode

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 295, Issue , 2013, Pages 69-71

  Lefaix Jeuland, H ^a   Moll, S ^a   Legendre, F ^a   Jomard, F ^b  

^a SERVICE DE RECHERCHES DE MÉTALLURGIE PHYSIQUE   (France)

^b Centre National de la Recherche Scientifique   (France)

Author keywords

Depth profiling; Helium; Ion implantation; SIMS

Indexed keywords

DETECTION MODE; FIRST IONIZATION POTENTIALS; IMPLANTED HELIUM; MOLECULAR IONS; MONOCRYSTALLINE; POLYCRYSTALLINE; PRIMARY IONS; PROJECTED RANGE; PURE IRON;

CESIUM; CESIUM COMPOUNDS; DEPTH PROFILING; ION IMPLANTATION; IONIZATION POTENTIAL; SECONDARY ION MASS SPECTROMETRY;

HELIUM;

EID: 84871807572     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2012.11.003     Document Type: Article

References (8)

1. H. Ullmaier Radiat. Eff. 78 1983 1 10
2. J. Bøttiger J. Nucl. Mater. 78 1978 161 181
3. M.B. Lewis, and W.R. Allen Nucl. Instrum. Methods Phys. Res. B 35 1988 10 16
4. M.B. Lewis Nucl. Instrum. Methods 190 1981 605 611
5. R.G. Wilson, V.R. Delin, and C.G. Hopkins Appl. Phys. Lett. 41 1982 929 931
6. R.G. Wilson Appl. Phys. Lett. 45 1984 107 109
7. A.K. Tyagi, K.G.M. Nair, and K. Krishan Bull. Mater. Sci. 16 1993 45 49
8. M.J. Bailey, C. Jeynes, B.J. Sealy, R.P. Webb, and R.M. Gwilliam Nucl. Instrum. Methods Phys. Rev. B 268 2010 2051 2055