Cleaning of silicon density standards

19th IMEKO World Congress 2009

Volumn 1, Issue , 2009, Pages 133-135

  Bettin, Horst ^a   Schiel, Detlef ^a   Vogtmann, Martin ^a   Niemann, Henning ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Carbonaceous layer; Cleaning; Infrared absorption; Mass comparison; Silicon density standard

Indexed keywords

CARBONACEOUS LAYERS; COMPARISON MEASUREMENT; HYDROSTATIC WEIGHING; INFRARED ABSORPTION TECHNIQUES; LAYER THICKNESS; MASS COMPARISON; MASS DETERMINATION;

CLEANING; INFRARED ABSORPTION; LIGHT ABSORPTION; PARAFFINS; SPHERES;

SILICON;

EID: 84871603969     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. K. Fujii, "Precision density measurements of solid materials by hydrostatic weighing," Meas. Sci. Technol., vol. 17, no. 10, pp. 2551-2559, Oct. 2006.
2. H. Bettin and M. Vogtmann, "Mass comparison facility for cleaning control of silicon density standards" Proc. PTB Annual Rep., 2006 [online]. http://www.ptb.de/de/org/3 /nachrichten3/-ndex.htm.
3. H. Bettin, H. Toth, "Density Determination of a Small Isotopically Enriched Silicon Single Crystal", IEEE Trans. Instrum. Meas., vol. 56, no. 2, pp. 257-261, Apr. 2007.
4. M. P. Seah and S. J. Spencer, "Ultrathin SiO2 on Si. I. Quantifying and removing carbonaceous contamination", J. Vac. Sci. Technol. A, vol. 21, no. 2, pp. 345-352, Mar./Apr. 2003.
5. H. Bettin and H. Toth, "Solid density determination by the pressure-of-flotation method," Meas. Sci. Technol., vol. 17, no. 10, pp. 2567-2573, Oct. 2006.
6. OIML International Recommendation R111-1, edition 2004, p29.