Elastomer-based pneumatic switch for radio frequency microdevices

Journal of Microelectromechanical Systems

Volumn 21, Issue 6, 2012, Pages 1410-1417

  Shah, Charan M ^a   Sriram, Sharath ^a   Bhaskaran, Madhu ^a   Nasabi, Mahyar ^a   Nguyen, Thach Giang ^a   Rowe, Wayne S T ^a   Mitchell, Arnan ^a  

^a RMIT UNIVERSITY   (Australia)

Author keywords

Coplanar waveguides (CPWs); flexible electronics; pneumatic switching; polydimethylsiloxane (PDMS); radio frequency (RF) devices

Indexed keywords

COPLANAR TRANSMISSION LINES; HIGH FREQUENCY HF; LOW DIELECTRIC CONSTANTS; MICROMECHANICAL SWITCH; MICROPNEUMATICS; MICROSWITCHES; POLYDIMETHYLSILOXANE PDMS; PROOF OF CONCEPT; RADIO FREQUENCIES; RADIO FREQUENCY DEVICES; RADIO FREQUENCY TRANSMISSION;

COPLANAR WAVEGUIDES; ELASTOMERS; ELECTRIC LINES; FLEXIBLE ELECTRONICS; MICROCHANNELS; MICROWAVE DEVICES; PLASTICS; PNEUMATICS; RADIO WAVES; SUBSTRATES; TRANSMISSION LINE THEORY;

SILICONES;

EID: 84870572461     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2208220     Document Type: Article

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